DIELECTRIC PROPERTIES OF PHOSPHORUS NITRIDE FILMS
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS
1976
37
5
554-554
CHEMICAL EROSION OF SOME LOW-Z MATERIALS BY HYDROGEN PLASMA AND ON POSSIBILITY OF REGENERATION OF 1ST WALL BY LOW-PRESSURE PLASMA CVD
JOURNAL OF NUCLEAR MATERIALS
1976
63
1
405-409
HETEROGENEOUS REACTIONS IN NONISOTHERMAL LOW-PRESSURE PLASMAS - PREPARATIVE ASPECTS AND APPLICATIONS
PURE AND APPLIED CHEMISTRY
1976
48
2
163-178