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- Title:
DETERMINATION OF NONHOMOGENEOUS HIGH-CONCENTRATION DEPTH DISTRIBUTIONS USING ELASTIC BACKSCATTERING DATA
- Author(s):
- BRAUN, M; BREWER, R; STUESSI, H; al., et
- Journal title:
- APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
- Year:
- 1982
- Journal volume:
- 28
- Journal issue:
- 1
- Pages contribution:
- 25-33
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