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- Titel:
DETERMINATION OF NONHOMOGENEOUS HIGH-CONCENTRATION DEPTH DISTRIBUTIONS USING ELASTIC BACKSCATTERING DATA
- Autor(en):
- BRAUN, M; BREWER, R; STUESSI, H; al., et
- Zeitschriftentitel:
- APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
- Jahr:
- 1982
- Band / Volume:
- 28
- Heft / Issue:
- 1
- Seitenangaben Beitrag:
- 25-33
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