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Title:

DETERMINATION OF NONHOMOGENEOUS HIGH-CONCENTRATION DEPTH DISTRIBUTIONS USING ELASTIC BACKSCATTERING DATA

Author(s):
BRAUN, M; BREWER, R; STUESSI, H; al., et
Journal title:
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Year:
1982
Journal volume:
28
Journal issue:
1
Pages contribution:
25-33
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