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- Title:
DETERMINATION OF THE ENERGIES OF IMPURITY IONS IN A LOW-PRESSURE PLASMA USING PLASMA CHEMICAL ETCHING
- Author(s):
- GIMZEWSKI, JK; VEPREK, S
- Journal title:
- HELVETICA PHYSICA ACTA
- Year:
- 1983
- Journal volume:
- 56
- Journal issue:
- 4
- Pages contribution:
- 959-960
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