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Title:

A NOVEL METHOD FOR THE DETERMINATION OF THE ENERGIES OF IMPURITY IONS BOMBARDING A SOLID-SURFACE EXPOSED TO A LOW-PRESSURE PLASMA

Author(s):
GIMZEWSKI, JK; VEPREK, S
Journal title:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
Year:
1984
Journal volume:
2
Journal issue:
1
Pages contribution:
35-39
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