A NOVEL METHOD FOR THE DETERMINATION OF THE ENERGIES OF IMPURITY IONS BOMBARDING A SOLID-SURFACE EXPOSED TO A LOW-PRESSURE PLASMA

Titel:: A NOVEL METHOD FOR THE DETERMINATION OF THE ENERGIES OF IMPURITY IONS BOMBARDING A SOLID-SURFACE EXPOSED TO A LOW-PRESSURE PLASMA
Autor(en):: GIMZEWSKI, JK; VEPREK, S
Zeitschriftentitel:: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
Jahr:: 1984
Band / Volume:: 2
Heft / Issue:: 1
Seitenangaben Beitrag:: 35-39
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