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- Title:
DOMINANT REACTION CHANNELS AND THE MECHANISM OF SILANE DECOMPOSITION IN A H2-SI(S)-SIH4 GLOW-DISCHARGE
- Author(s):
- ENSSLEN, K; VEPREK, S
- Journal title:
- PLASMA CHEMISTRY AND PLASMA PROCESSING
- Year:
- 1987
- Journal volume:
- 7
- Journal issue:
- 2
- Pages contribution:
- 139-153
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