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- Title:
OBSERVATION OF DUST PARTICLE GROWTH AND FALLOUT IN RF-EXCITED SILANE DISCHARGES
- Author(s):
- BOHME, W; KOHLER, WE; ROMHELD, M; al., et
- Journal title:
- IEEE TRANSACTIONS ON PLASMA SCIENCE
- Year:
- 1994
- Journal volume:
- 22
- Journal issue:
- 2
- Pages contribution:
- 110-115
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