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Title:

OBSERVATION OF DUST PARTICLE GROWTH AND FALLOUT IN RF-EXCITED SILANE DISCHARGES

Author(s):
BOHME, W; KOHLER, WE; ROMHELD, M; al., et
Journal title:
IEEE TRANSACTIONS ON PLASMA SCIENCE
Year:
1994
Journal volume:
22
Journal issue:
2
Pages contribution:
110-115
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