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Title:

Pseudomorphic growth of ultrathin cubic 3C-SiC films on Si(100) by temperature programmed organometallic chemical vapor deposition

Author(s):
HOFMANN, J; VEPREK, S; HEINDL, J
Journal title:
JOURNAL OF APPLIED PHYSICS
Year:
1999
Journal volume:
85
Journal issue:
5
Pages contribution:
2652-2657
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