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- Title:
OPEN QUESTIONS REGARDING THE MECHANISM OF PLASMA-INDUCED DEPOSITION OF SILICON
- Author(s):
- VEPREK, S; VEPREKHEIJMAN, MGJ
- Journal title:
- PLASMA CHEMISTRY AND PLASMA PROCESSING
- Year:
- 1991
- Journal volume:
- 11
- Journal issue:
- 3
- Pages contribution:
- 323-334
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