- Titel:
OPEN QUESTIONS REGARDING THE MECHANISM OF PLASMA-INDUCED DEPOSITION OF SILICON
- Autor(en):
- VEPREK, S; VEPREKHEIJMAN, MGJ
- Zeitschriftentitel:
- PLASMA CHEMISTRY AND PLASMA PROCESSING
- Jahr:
- 1991
- Band / Volume:
- 11
- Heft / Issue:
- 3
- Seitenangaben Beitrag:
- 323-334
- BibTeX