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- Title:
POSSIBLE CONTRIBUTION OF SIH2 AND SIH3 IN THE PLASMA-INDUCED DEPOSITION OF AMORPHOUS-SILICON FROM SILANE
- Author(s):
- VEPREK, S; VEPREKHEIJMAN, MGJ
- Journal title:
- APPLIED PHYSICS LETTERS
- Year:
- 1990
- Journal volume:
- 56
- Journal issue:
- 18
- Pages contribution:
- 1766-1768
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