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- Author(s):
- VEPREK, S; KARVANKOVA, P; VEPREK-HEIJMAN, MGJ
- Title:
- Possible role of oxygen impurities in degradation of nc-TiN/a-Si3N4 nanocomposites
- Journal title:
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Year:
- 2005
- Journal volume:
- 23
- Journal issue:
- 6
- Pages contribution:
- L17-L21
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