Login
- Title:
SURFACE-CHEMISTRY IN ELECTRON-IMPACT INDUCED ETCHING AND PLASMA INDUCED DEPOSITION
- Author(s):
- VEPREK, S
- Journal title:
- ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
- Year:
- 1986
- Journal volume:
- 191
- Pages contribution:
- 61-COLL
BibTeX
BibTeX