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- Title:
EFFECT OF SUBSTRATE BIAS ON THE PROPERTIES OF MICROCRYSTALLINE SILICON FILMS DEPOSITED IN A GLOW-DISCHARGE
- Author(s):
- SAROTT, FA; IQBAL, Z; VEPREK, S
- Journal title:
- SOLID STATE COMMUNICATIONS
- Year:
- 1982
- Journal volume:
- 42
- Journal issue:
- 6
- Pages contribution:
- 465-468
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