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Document type:
Konferenzbeitrag 
Contribution type:
Vortrag / Präsentation 
Author(s):
Bosetti G., Manz J., Krumbein U., Schrag G. 
Title:
Reliable Compact Models for the Investigation of Acoustic High-Frequency Effects in MEMS Transducers 
Book / Congress title:
EUROSENSORS 2018 
Congress (additional information):
Graz, Austria, 2018. 
Date of congress:
9-12 September 2018 
Year:
2018 
Year / month:
2018-09 
Month:
Sep 
Language:
en 
TUM Institution:
Lehrstuhl für Technische Elektrophysik 
Ingested:
20.11.2018