@inproceedings{1463737,

	author = {Bosetti G. and  Manz J. and  Krumbein U. and  Schrag G.},
	title = {Reliable Compact Models for the Investigation of Acoustic High-Frequency Effects in MEMS Transducers},
	booktitle = { EUROSENSORS 2018},
	year = {2018},

        month = {Sep},









        language = {en},



	
}