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Title:

A novel silicon "star-comb" microphone concept for enhanced signal-to-ratio: modeling, design and first prototype

Document type:
Konferenzbeitrag
Contribution type:
Vortrag / Präsentation
Author(s):
Manz, J.; Bosetti, G.; Dehe, A.; Schrag, G
Pages contribution:
pp. 69-70
Book / Congress title:
Proceedings of 19th International Conference on Solid-State Sensors, Actuators and Microsystems 2017
Congress (additional information):
Kaohsiung, Taiwan (Transducers)
Date of congress:
18-22 June2017
Year:
2017
Year / month:
2017-06
Month:
Jun
Pages:
pp. 69-70
Language:
en
TUM Institution:
Lehrstuhl für Technische Elektrophysik
Ingested:
23.10.2018
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