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- Title:
Modeling Distributed Electrostatic Effects in Silicon Microphones and Their Impact on the Performance
- Document type:
- Konferenzbeitrag
- Contribution type:
- Textbeitrag / Aufsatz
- Author(s):
- Künzig, T.; Schrag, G.; Dehe, A.; Wachutka, G.
- Book / Congress title:
- Proceedings of SPIE 9517, Smart Sensors, Actuators, and MEMS VII and Cyber Physical Systems
- Congress (additional information):
- SPIE
- Year:
- 2015
- Pages:
- 9517L1-9517L6
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