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Title:

A Comb-Based Capacitive MEMS Microphone with High Signal-to-Noise Ratio: Modeling and Noise-Level-Analysis

Document type:
Konferenzbeitrag
Author(s):
Anzinger, S.; Manz, J.; Dehe, A.; Schrag, G.
Book / Congress title:
Proceedings of the Eurosensors 2017/Multidisciplinary Publishing Institute Proceedings, Vol. 1, 2017
Congress (additional information):
Paris, France
Volume:
Vol. 1
Date of congress:
3–6 September 2017
Year:
2017
Year / month:
2017-09
Month:
Sep
Pages:
pp. 346
Language:
en
TUM Institution:
Lehrstuhl für Technische Elekrophysik
Ingested:
29.12.2017
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