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Title:
Towards High Fidelity Silicon Microphones: Evaluating the Potential of Industrial Microsystems Applying Tailored System-level Models
Document type:
Konferenzbeitrag
Contribution type:
Vortrag / Präsentation
Author(s):
Schrag, G.; Kuenzig, T.
Pages contribution:
6
Book / Congress title:
Proceedings of 18th International Concerence on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
Congress (additional information):
Eurosime 2017
Date of congress:
April, 2 - 5, 2017
Year:
2017
Year / month:
2017-04
Month:
Apr
Pages:
6
Print-ISBN:
978-1-5090-4343-9
Reviewed:
ja
Language:
en
Notes:
IEEE Catalog Number: CFP17566-USB
BibTeX
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mediaTUM Gesamtbestand
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TUM School of Computation, Information and Technology
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Microsensors and Actuators (Prof. Schrag)
2017
mediaTUM Gesamtbestand
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2017
Fakultäten
Elektrotechnik und Informationstechnik
Technische Elektrophysik (Prof. Wachutka)