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- Titel:
Simulation-Based Design of an Electrostatically Driven Micro-Actuator for Fluid Transport in Mobile Applications
- Dokumenttyp:
- Konferenzbeitrag
- Autor(en):
- Seidl, M.; Gehring, M.; Krumbein, U. and Schrag, G.
- Kongress- / Buchtitel:
- 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
- Datum der Konferenz:
- 1 -5 Juli
- Jahr:
- 2019
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