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Title:

Simulation-Based Design of an Electrostatically Driven Micro-Actuator for Fluid Transport in Mobile Applications

Document type:
Konferenzbeitrag
Author(s):
Seidl, M.; Gehring, M.; Krumbein, U. and Schrag, G.
Book / Congress title:
20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
Date of congress:
1 -5 Juli
Year:
2019
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