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- Title:
Simulation-Based Design of an Electrostatically Driven Micro-Actuator for Fluid Transport in Mobile Applications
- Document type:
- Konferenzbeitrag
- Author(s):
- Seidl, M.; Gehring, M.; Krumbein, U. and Schrag, G.
- Book / Congress title:
- 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
- Date of congress:
- 1 -5 Juli
- Year:
- 2019
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