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Title:

Modeling of an out-of-plane capacitive MEMS transducer with dynamically coupled electrodes

Document type:
Konferenzbeitrag
Contribution type:
Vortrag / Präsentation
Author(s):
Bosetti, G.; Manz, J.; Schrag, G.; Dehe, A.
Book / Congress title:
Proceedings of DTIP 2017, the Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
Congress (additional information):
Bordeaux, France
Date of congress:
29. May – 1. June
Year:
2017
Year / month:
2017-05
Month:
May
Language:
en
Ingested:
01.10.2018
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