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- Title:
Reliable Compact Models for the Investigation of Acoustic High-Frequency Effects in MEMS Transducers
- Document type:
- Konferenzbeitrag
- Contribution type:
- Vortrag / Präsentation
- Author(s):
- Bosetti G.; Manz J.; Krumbein U.; Schrag G.
- Book / Congress title:
- EUROSENSORS 2018
- Congress (additional information):
- Graz, Austria, 2018.
- Date of congress:
- 9-12 September 2018
- Year:
- 2018
- Year / month:
- 2018-09
- Month:
- Sep
- Language:
- en
- TUM Institution:
- Lehrstuhl für Technische Elektrophysik
- Ingested:
- 20.11.2018
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