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Title:

Virtual design and optimization studies for industrial silicon microphones applying tailored system-level modeling

Document type:
Magazinartikel
Author(s):
Kuenzig, T.; Dehe, A.; Krumbein, U.; Schrag, G.
Journal title:
Journal of Micromechanics and Microengineering
Year:
2018
Journal volume:
28
Year / month:
2018-03
Month:
Mar
Language:
en
TUM Institution:
Lehrstuhl für Technische Elektrophysik
Ingested:
03.12.2018
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