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- Title:
A novel silicon "star-comb" microphone concept for enhanced signal-to-ratio: modeling, design and first prototype
- Document type:
- Konferenzbeitrag
- Contribution type:
- Vortrag / Präsentation
- Author(s):
- Manz, J.; Bosetti, G.; Dehe, A.; Schrag, G
- Pages contribution:
- pp. 69-70
- Book / Congress title:
- Proceedings of 19th International Conference on Solid-State Sensors, Actuators and Microsystems 2017
- Congress (additional information):
- Kaohsiung, Taiwan (Transducers)
- Date of congress:
- 18-22 June2017
- Year:
- 2017
- Year / month:
- 2017-06
- Month:
- Jun
- Pages:
- pp. 69-70
- Language:
- en
- TUM Institution:
- Lehrstuhl für Technische Elektrophysik
- Ingested:
- 23.10.2018
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