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- Title:
Modeling of an out-of-plane capacitive MEMS transducer with dynamically coupled electrodes
- Document type:
- Konferenzbeitrag
- Contribution type:
- Vortrag / Präsentation
- Author(s):
- Bosetti, G.; Manz, J.; Schrag, G.; Dehe, A.
- Book / Congress title:
- Proceedings of DTIP 2017, the Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
- Congress (additional information):
- Bordeaux, France
- Date of congress:
- 29. May – 1. June
- Year:
- 2017
- Year / month:
- 2017-05
- Month:
- May
- Language:
- en
- Ingested:
- 01.10.2018
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