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Title:

Enabling Technologies for System-Level Simulation of MEMS

Document type:
Konferenzbeitrag
Contribution type:
Textbeitrag / Aufsatz
Author(s):
Bechtold, T.; Schrag, G.; Feng, L.
Book / Congress title:
Proceedings of 14th International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE
Congress (additional information):
Wrozlaw, Poland, April 15-17, 2013
Publisher:
IEEE
Year:
2013
Print-ISBN:
978-1-4673-6137-8
Language:
en
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