Enabling Technologies for System-Level Simulation of MEMS
Document type:
Konferenzbeitrag
Contribution type:
Textbeitrag / Aufsatz
Author(s):
Bechtold, T.; Schrag, G.; Feng, L.
Book / Congress title:
Proceedings of 14th International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EuroSimE