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- Title:
Improving the reliability of electrostatically actuated RF-MEMS switches: FEM simulations and measurements on a thermal recovery mechanism
- Document type:
- Konferenzbeitrag
- Contribution type:
- Vortrag / Präsentation
- Author(s):
- Künzig, T.; Schrag, G.; Iannacci, J.; Wachutka, G.
- Pages contribution:
- pp 340-345
- Book / Congress title:
- Proceedings of the 13th Mechatronics Forum - International Conference
- Congress (additional information):
- Mechatronics 2012, Sept. 17-19, Linz, Austria
- Year:
- 2012
- Reviewed:
- ja
- Language:
- en
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