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Document type:
Konferenzbeitrag 
Author(s):
Niessner, M. ; Schrag, G. ; Wachutka, G.; Iannacci, J. ; Reutter, T. ; Mulatz, H. 
Title:
"Non-linear model for the simulation of viscously damped RF-MEMS switches at varying ambient pressure conditions" 
Pages contribution:
pp. 618-621 
Book / Congress title:
Proceedings of EUROSENSORS XXIII 
Congress (additional information):
September 6-9, 2009, Lausanne, Schweiz 
Year:
2009 
Language:
en 
Format:
Text