- Dokumenttyp:
- Konferenzbeitrag
- Autor(en):
- Durasiewicz, C. P.; Güntner, S.; Kibler, S.
- Titel:
- "Piezoceramic Mounting Process and Adapted Pretension for Improved Microvalve Functionality and Reliability"
- Kongress- / Buchtitel:
- MikroSystemTechnik Kongress
- Jahr:
- 2021
- BibTeX