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Document type:
Konferenzbeitrag 
Author(s):
R. Behlert and G. Schrag 
Title:
Inspired by Nature: Efficient Piezoelectric MEMS Actuator Based on Wavelike Excitation 
Book / Congress title:
20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) 
Date of congress:
23- 27.06 
Year:
2019