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Document type:
Konferenzbeitrag 
Contribution type:
Vortrag / Präsentation 
Author(s):
J. Manz, G. Schrag, A. Dehe, U. Krumbein, G. Wachutka 
Title:
Investigations on a Novel Silicon MEMS Microphone Concept for a High Signal-to-Noise Ratio 
Pages contribution:
pp. 54-55 
Book / Congress title:
MICROSYSTEMS TECHNOLOGY IN GERMANY 2018 
Year:
2018 
Language:
en 
TUM Institution:
Lehrstuhl für Technische Elektrophysik 
Ingested:
04.12.2018