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Document type:
Konferenzbeitrag 
Author(s):
Kuenzig, T.; Schrag, G.; Nawaz, M.; Herrmann, M.; Dehe, A.; Wachutka, G. 
Title:
System-Level Modeling of Silicon Microphones Including Distributed Effects 
Book / Congress title:
EUROSENSORS 2014, the XXVIII edition of the conference series 
Congress (additional information):
Brescia, Italy, Sept. 7-10, 2014 
Publisher:
Elsevier Procedia Engineering 
Year:
2014 
Language:
en