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Document type:
Konferenzbeitrag 
Author(s):
Behlert, R.: Künzig, T.; Schrag, G.: Wachutka, G. 
Title:
Theoretical and Experimental Investigations on Failure Mechanisms Occuring During Long-Term Cycling of Electrostatic Actuators 
Editor:
IEEE 
Book / Congress title:
15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems 
Congress (additional information):
EuroSimE 2014 
Date of congress:
April, 7-9 
Year:
2014 
E-ISBN:
978-1-4799-4790-4 
Reviewed:
ja 
Language:
en