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- Title:
High-Fidelity 3D FEM Simulation Model for Stress Reduction in MEMS Microphones
- Document type:
- Konferenzbeitrag
- Contribution type:
- Vortrag / Präsentation
- Author(s):
- Zöpfl, T.; Wittman, F.; Schrag, G.; Wachutka, G.,
- Pages contribution:
- pp. 68-71
- Book / Congress title:
- EUROSENSORS XXII
- Congress (additional information):
- 07.09.208 - 10.09.2008, Dresden
- Year:
- 2008
- Language:
- de
- Format:
- Text
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