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- Title:
Automated extraction of multi-energy domain reduced-order models demonstrated on capacitive MEMS microphones
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Bedyk, W. ; Niessner, M. ; Schrag, G. ; Wachutka, G. ; Margesin, B. ; Faes, A.
- Journal title:
- Sensors and Actuators A Physical
- Year:
- 2008
- Language:
- de
- Format:
- Text
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