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- Title:
Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors
- Document type:
- Konferenzbeitrag
- Author(s):
- S. Gassner; R. Schaller; M. Eberl; C. Koblinski , S. Essing; M. Ghaderi ; K. Schmitt, J. Wöllenstein
- Book / Congress title:
- sensors
- Year:
- 2022
BibTeX
Occurrences:
- mediaTUM GesamtbestandEinrichtungenSchools TUM School of Computation, Information and TechnologyDepartmentsElectrical EngineeringMicrosensors and Actuators (Prof. Schrag)