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- Title:
"Piezoceramic Mounting Process and Adapted Pretension for Improved Microvalve Functionality and Reliability"
- Document type:
- Konferenzbeitrag
- Author(s):
- Durasiewicz, C. P.; Güntner, S.; Kibler, S.
- Book / Congress title:
- MikroSystemTechnik Kongress
- Year:
- 2021
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