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- Title:
Low Power Capacitive Ultrasonic Transceiver Array for Airborne Object Detection
- Document type:
- Konferenzbeitrag
- Author(s):
- Anzinger, S.; Lickert, F.; Fusco, A.; Bosetti, G.; Tumpold, D.; Bretthauer, C.; Dehé, A.
- Book / Congress title:
- IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
- Year:
- 2020
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