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- Title:
Inspired by Nature: Efficient Piezoelectric MEMS Actuator Based on Wavelike Excitation
- Document type:
- Konferenzbeitrag
- Author(s):
- Behlert, R.; Schrag, G.
- Book / Congress title:
- 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
- Date of congress:
- 23- 27.06
- Year:
- 2019
- Fulltext / DOI:
- doi:10.1109/TRANSDUCERS.2019.8808290
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