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- Title:
Design of a Micropump Based on an Industrial Microphone Manufacturing Process
- Document type:
- Konferenzbeitrag
- Author(s):
- Seidl, M.; Klein, W.; Vobl, M.; Krumbein, U.; Schrag, G.
- Book / Congress title:
- Int. Conf. on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
- Date of congress:
- 12- 15. Mai
- Year:
- 2019
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