Mixed-Level Approach for the Modeling of Distributed Effects in Microsystems

Niessner, M.; Schrag, G.

Title:: Mixed-Level Approach for the Modeling of Distributed Effects in Microsystems
Document type:: Buchbeitrag
Author(s):: Niessner, M.; Schrag, G.
Pages contribution:: pp. 163-189
Book title:: System-Level Modeling of MEMS
Publisher:: Wiley-VHC
Publisher address:: Weinheim
Year:: 2013
Print-ISBN:: 978-3-527-31903-9
Bookseries title:: Advanced Micro & Nanosystems
Bookseries volume:: 10
Format:: Text
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