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- Title:
Reliable Piezoelectric FEM-Simulations of MEMS Microphones: Basis for Intrinsic Stress Reduction"
- Document type:
- Konferenzbeitrag
- Author(s):
- Reutter, T.; Schrag, G.
- Pages contribution:
- pp. 193-196
- Book / Congress title:
- Proceedings of the Ninth IEEE Sensors Conference
- Congress (additional information):
- Nov. 1-4, 2010, Kona, Hawaii
- Year:
- 2010
- Reviewed:
- ja
- Language:
- en
- Format:
- Text
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