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Title:

Reliable Piezoelectric FEM-Simulations of MEMS Microphones: Basis for Intrinsic Stress Reduction"

Document type:
Konferenzbeitrag
Author(s):
Reutter, T.; Schrag, G.
Pages contribution:
pp. 193-196
Book / Congress title:
Proceedings of the Ninth IEEE Sensors Conference
Congress (additional information):
Nov. 1-4, 2010, Kona, Hawaii
Year:
2010
Reviewed:
ja
Language:
en
Format:
Text
 BibTeX