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Titel:

Development of novel coating technology by vacuum arc with rotating cathodes for industrial production of nc-(Al1-xTix)N/a-Si3N4 superhard nanocomposite coatings for dry, hard machining

Autor(en):
JILEK, M; CSELLE, T; HOLUBAR, P; al., et
Zeitschriftentitel:
PLASMA CHEMISTRY AND PLASMA PROCESSING
Jahr:
2004
Band / Volume:
24
Heft / Issue:
4
Seitenangaben Beitrag:
493-510
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